MEMS Gas Mass Flow Meters, offered by HYKO® Technologies, deliver direct mass flow measurement of gases using advanced MEMS (Micro-Electro-Mechanical Systems) thermal sensing technology. Designed for accuracy, fast response, compact integration, and long-term stability, flow meters are ideal for OEMs, system integrators, laboratories, and industrial gas applications where precision and repeatability drive outcomes.

Manufactured by Siargo USA, these instruments measure true mass flow independent of pressure and temperature variations, eliminating the need for complex compensation algorithms.

Features and Benefits 

• True mass flow measurement independent of pressure and temperature

• Advanced MEMS thermal sensing technology for high accuracy and repeatability

• Excellent performance at very low and very high gas flow rates

• Ultra-fast response time for real-time monitoring and control

• Compact and lightweight design ideal for OEM and system integration

• Wide gas compatibility including air, nitrogen, oxygen, hydrogen, helium, and natural gas

• Low pressure drop resulting in reduced energy consumption

• Stable long-term performance with minimal drift

• Digital and analog outputs for easy PLC, SCADA, and controller integration

• High resolution for precise gas dosing and blending applications

• Suitable for continuous duty industrial and laboratory environments

• Reduced installation and commissioning complexity

• Lower total cost of ownership compared to conventional gas flow meters

• Ideal for industrial, analytical, medical, and semiconductor gas applications

• Local application engineering, supply, and support in India by HYKO® Technologies

We offer a unique solution for multi-parameter flow measurement with mass flow, gauge pressure, temperature, and humidity.