MEMS Gas Mass Flow Meters, offered by HYKO® Technologies, deliver direct mass flow measurement of gases using advanced MEMS (Micro-Electro-Mechanical Systems) thermal sensing technology. Designed for accuracy, fast response, compact integration, and long-term stability, flow meters are ideal for OEMs, system integrators, laboratories, and industrial gas applications where precision and repeatability drive outcomes.
Manufactured by Siargo USA, these instruments measure true mass flow independent of pressure and temperature variations, eliminating the need for complex compensation algorithms.
Features and Benefits
True mass flow measurement independent of pressure and temperature
Advanced MEMS thermal sensing technology for high accuracy and repeatability
Excellent performance at very low and very high gas flow rates
Ultra-fast response time for real-time monitoring and control
Compact and lightweight design ideal for OEM and system integration
Wide gas compatibility including air, nitrogen, oxygen, hydrogen, helium, and natural gas
Low pressure drop resulting in reduced energy consumption
Stable long-term performance with minimal drift
Digital and analog outputs for easy PLC, SCADA, and controller integration
High resolution for precise gas dosing and blending applications
Suitable for continuous duty industrial and laboratory environments
Reduced installation and commissioning complexity
Lower total cost of ownership compared to conventional gas flow meters
Ideal for industrial, analytical, medical, and semiconductor gas applications
Local application engineering, supply, and support in India by HYKO® Technologies
We offer a unique solution for multi-parameter flow measurement with mass flow, gauge pressure, temperature, and humidity.
MEMS Gas Mass Flow Sensors
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Flow Range: 0–2 / 3 / 4 / 5 SLPM (MF4003); 0–10 / 20 / 30 / 40 / 50 SLPM (MF4008)
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Accuracy: ±(1.5% of reading + 0.2% FS)
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Repeatability: ±0.25%
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Response Time: 10 ms (default); selectable 20–1000 ms
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Power Supply: 8–24 VDC, 50 mA
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Output Signals: Linear 0.5–4.5 VDC; Digital RS485 / RS232
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Maximum Pressure Loss: 0.1 kPa @ 5 SLPM (MF4003); 0.6 kPa @ 50 SLPM (MF4008)
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Pressure Rating: 0.5 MPa
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Operating Temperature: −10 to +55 °C
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Operating Humidity: <95% RH (non-condensing)
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Mechanical Connection: BSPT ¼” or One-touch fittings (4 / 6 / 8 mm)
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Electrical Connection: 5-pin AMPMODU MTE connector or compatible
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Calibration Conditions: Air at 20 °C, 101.325 kPa
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Maximum Over-Flow: 30 SLPM (MF4003); 200 SLPM (MF4008)
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Maximum Flow Change Rate: 4 SLPM/s (MF4003); 30 SLPM/s (MF4008)
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Weight: Approx. 50 g (with BSPT fitting)
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Storage Temperature: −20 to +70 °C
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Industrial gas flow measurement
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Gas distribution skids
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Leak testing systems
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Gas mixing and blending systems
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Semiconductor & electronics manufacturing
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Medical gas equipment
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Laboratory and R&D gas flow measurement
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Fuel cell and hydrogen systems
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Environmental monitoring equipment
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Analytical instruments and gas analyzers
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Burner and combustion air control
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Pneumatic automation systems
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OEM equipment gas flow integration
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